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STO on Silicon

Epitaxially grown strontium titanate on silicon substrates

STO (SrTiO₃) on Si substrates

What we can offer you

4nm crystalline oxide epitaxial layer deposited on Si substrate
Best-in-class quality and stability
Direct integration on silicon enbles scaling of your research/technology
Doped Si backside layer instead of Nb doping

... enabling your ...

project on oxide epitaxy with perovskites (e.g., ferroelectrics, multiferroics, colossal magnetoresistance, high-T_c superconductivity, ...)
research requiring layer transfer of STO
need for larger surfaces than what is possible with STO single crystals
MEMS processes fabricating membranes by underetching the Si substrate
Other applications: RF, sensing, spintronics, material science, ...

Find STO on Si substrates in our shop

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Specifications

Size: 5x5, 10x10, 15x15 mm² (other dimensions on request)
Thickness: 725 ± 25 μm
Orientation: (001) ± 0.5°
Doping: p-type
Resistivity: 1-30 Ωcm
SrTiO₃ layer: 4.0 ± 0.2 nm
Roughness: 3 ± 2 Å
Mosaicity: 0.4°
Max temp.: 800°C

References

Strain-Engineered Metal-to-Insulator Transition and Orbital in Nickelate Superlattices Integrated on Silicon, B. Chen et al., Adv. Mater., 2004995 (2020)

Integration of Single Oriented Oxide Superlattices on Silicon Using Various Template Techniques, B. Chen et al., ACS Appl. Mater. Interfaces, 12(38) 42925 (2020)

Thermal-strain-engineered ferromagnetism of LaMnO3/SrTiO3 heterostructures grown on silicon, B. Chen et al., Physical Review Materials 4, 024406 (2020)

Microstructure analysis of epitaxial BaTiO3 thin films on SrTiO3-buffered Si: Strain and dislocation density quantification using HRXRD methods, A.Borzì et al., Materialia, 14, 100953 (2020)

Monolithically Integrated Microelectromechanical Systems for On-Chip Strain Engineering of Quantum Dots, Y. Zhang et al., Nano Lett., 16(9), 5785 (2016)

Wafer level integration of epitaxial piezoelectric thin films for novel NEMS, MEMS and MOEMS applications, M. Dekkers et al., Informatics, Electronics and Microsystems: TechConnect Briefs (2017)