Zirconiumoxid Substrate

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Materials properties

Structure formula: ZrO2:Y(9.5% Y)  
State: monocrystalline (twin free)  
Crystal structure: cubic a = 0.5125 nm
Melting point: 2780°C  
Thermal expansion coefficient: 8 * 10-6/°C  
Dielectrical constant (e): 27  
 

Substrate properties

Production method: Skull method
Orientation: (100)
Orientation accuracy: £0.5°
Standard size: 10mm x 10mm x thickness 0.5mm
Tolerance of length: +0 / -0.05mm
Tolerance of thickness: +0 / -0.02mm
Parallelness: £0.02°
Polishing: Standard: one side epi-polished
Flatness: £1µm / 10mm
Roughness of surface: Rmax £4nm (average Ra =< 1nm)
Scratches: none
Surface quality: with light microscope without defects

Overview of elements with access to our shop

1 18
H
2 13 14 15 16 17
He
Li Be B C
N
O
F
Ne
Na Mg 3 4 5 6 7 8 9 10 11 12 Al Si P S
Cl
Ar
K Ca Sc Ti V Cr Mn Fe Co Ni Cu Zn Ga Ge As Se
Br
Kr
Rb Sr Y Zr Nb Mo
Tc
Ru Rh Pd Ag Cd In Sn Sb Te I
Xe
Cs Ba La Hf Ta W Re Os Ir Pt Au Hg Tl Pb Bi
Po
At
Ra
Fr
Ra
Ac
Ce Pr Nd
Pm
Sm Eu Gd Tb Dy Ho Er Tm Yb Lu


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