Nanofabrication Products

are produced by our partner NTT AT

Goods and services are introduced in subcategories, which are linked to the webpage of NTT AT.

For questions, inquiries or orders please klick here.

Nanofabrication process services

• EB lithography (Electron beam lithography)
• Resist patterning (photo-lithography)
• Etching (Dry etching and Wet etching)
• Thin film fabrication
• Au nano patterns
• Conical structure nano pattern array (moth-eye structure for anti-reflection)
• X-ray mask, EB mask, Photo mask
• X-ray analysis service

Templates for Nanoimprint Lithography (NIL)

• Templates for Nanoimprint < Standard templates >
• "Custom-made" templates for Nanoimprint

Optical components

• Grating
• Step grating
• V-groove grating (Blazed grating)
• Multi-channel grating
• Microlens array
• Multi-level hologram
• Wire grid polarizer
• Anti-reflective structures
• Pin hole

Scale

• Scale for metrology (Standard type scale)
• Scale for step height measuring (Standard type scale)
• Standard sample for in-depth profiling
• nm-scale for nm-beam size measurement

Membrane / Stencil products

• SiC membrane , SiN membrane
• Stencil products
• Membrane MEMS