Sputter Targets

We are a leading manufacturer and supplier of research materials

Please request your non-binding offer. You can send us an E-mail or use our inquiry form.

MaTecK supplies high-purity materials and targets for a wide variety of coating processes. You can already find many of these materials in our online shop. We are happy to manufacture special sputtering targets on customer request in order to meet the requirements of your system and your application. You can also send us your inquiry and drawing via our contact form.

We have a wide range of metals, oxides, metallic alloys, carbides, borides, fluorides, etc. We have listed some of them below, but you are welcome to surprise us with your composition.

When it comes to shaping and the production process, we adapt to your requirements. Our production also meets your specifications with high demands on composition and dimensional accuracy. The targets are manufactured using powder metallurgy (biaxial) pressing, sintering, hot pressing, hot isostatic pressing (HIP) or vacuum melting.

We would be happy to bond your target to a backplate with elastomers or indium solder. This can be provided by you or manufactured by us.

Below are examples of possible target alloys and some parameters for the different bond types.

We are also happy to manufacture new alloy compositions and geometries according to your specifications.

Please request your non-binding offer. You can send us an E-mail or use our inquiry form.

Available materials and bond types

Metals

Aluminium	Chromium	Lead	Platinum	Tantalum
Antimony	Cobalt	Lithium	Potassium	Tellurium
Barium	Gallium	Magnesium	Rhenium	Tin
Beryllium	Germanium	Manganese	Rhodium	Titanium
Bismuth	Gold	Molybdenum	Rubidium	Tungsten
Boron	Hafnium	Niobium	Ruthenium	Vanadium
Cadmium	Indium	Nickel	Selenium	Zinc
Calcium	Iridium	Osmium	Silicon	Zirkonium
Carbon	Iron	Palladium	Strontium

Rare Earth

Cerium	Gadolinium	Neodymium	Terbium	Various Rare
Dysprosium	Holmium	Praseodymium	Thulium	Earth alloys
Erbium	Lutetium	Samarium	Ytterbium
Europium	Lanthanum	Scandium	Yttrium

Alloys

Al/B	Au/Pt	Cr/SiO2Cermet	Ir/Mn	Si/Al
Al/Cu	Au/Sn	Cu/Al	Ni/Cr	Si/Cr
Al/Cu/Si	Au/Zn	Cu/Cr	Ni/Fe	Ta/Ti
Al/Cr	Bi/Sb	Cu/Ga	Ni/Ti	Ti/Al
Al/Li	Bi/Sb/Se	Cu/Ni	Ni/V	Ti/W
Al/Mg	Bi/Sb/Se/Te	Cu/Sn	Ni/Zr	Ti/Zr
Al/Si	Bi/Sb/Te	Fe/Al/Si	Os/Ru	W/Ti
Al/Ti	Bi/Se	Fe/Cr	Pb/Se	Zn/Al
Au/Sb	Bi/Te	Fe/Mn	Pb/Te	Zr/Y
Au/Ag	Cd/Te	Fe/Ru/Ga/Si	Pb/Se/Te
Au/B	So/Cr	Fe/Si	Pd/Pt	and others
Au/Be	Co/Fe	Fe/Si/B/C	Pt/Ru
Au/Ge	Co/Nb/Zr	Ge/Si	Pt/Ag
Au/Ir	Co/Ni	Ge/Te	Sb/In
Au/Pd	Co/Ta/Zr	In/Sn	Sb/In/Sn

Oxides

Al2O3	CuO	PbZrO3	Supercond.	Y2O3
Sb2O3	HfO2 unstab.	LiNbO3	SrO	ZnO
BaTiO3	HfO2/CaO	MgO	SrTiO3	ZnO dop.
Bi2O3	HfO2/Y2O3	MoO3	SrZrO3	ZrO2 unstab.
Bi2TiO5	In2O3	Nb2O3	Ta2O5	ZrO2/CaO
Bi4Ti3O12	ITO	Nb2O5	ThO2	ZrO2/Y2O3
BiTiO3	LaAlO3	RE2O3	SnO2
CeO2	La2O3	SiO2	TiO2	and others
CrO3	PbTiO3	SiO	WO3

Borides

CrB2	Mo2B6	TiB2	VB2	and others
HfB2	NbB2	Wb	ZrB2
LaB6	TaB2	W2B

Carbides

B4C	Mo2C	TaC	WC6%Co	ZrC
Cr3C2	NbC	TiC	WC12%Co	and others
HfC	SiC	WC	VC

Fluorides

AlF3	CeF3	LiF	RE/NaF	YF3
BaF2	LaF3	MgF2	Na3AlF6
CaF2	PbF2	KF	ThF4	and others

Nitrides

AlN	HfN	Si3N4	TiN	ZrN
BN	NbN	TaN	VN	and others

Silicides

CrSi2	MoSi2	TaSi2	Ti5Si3	V3Si
Cr3Si	NbSi2	Ta5Si3	WSi2	ZrSi2
HfSi2	PtSi	TiSi2	VSi2	and others

Sulfides, Selenides, Tellurides

As2S3	PbS	NbSe2	TaTe2	ZnS
CdSe	PbTe	Nb-S	WSe2	ZnTe
CdSe	MoSe2	NbTe2	WsS2
CdTe	MoS2	TaSe2	WTe2	and others
PbSe	MoTe2	TaS2	ZnSe

Other materials available upon request.

We can also offer copper backing plates and bonding.

When asking for a quotation please inform about the desired size, purity, exact composition, geometrical shape and quantity.

Elastomer Specifications
Maximum Operating Temperature	250°C
Hardness (shore A)	72
Mass Density (g/cc)	1.5
Modulus of Elasticity	1875
Youngs Modulus	1875
Poisson´s Ratio, peak stress (PSI)	0.45
Lap Shear (PSI)	461

Thermal Conductivity (W/mK)	8.6
Coefficient of Thermal Expansion (1/K)	2.20E-04
Out Gassing	NASA A Rating (less than 1% TMC @ 150C @ 1E-7Torr for 24 hr
Maximum Operating Temperature (C)	250
Electrical Conductivity (Ohm/cm)	21

Indium Specifications
Crystal structure: Face-Centered Tetragonal: at 25C,
Density @20C	7,30 gm/cc

Melting point	156.6° C
Coefficient of thermal expansion	Linear, 24.8 µm/m K at 20 C
Specific Heat: @25 C	233 J/kg-K
Latent heat of fusion	28.47 kJ/kg
Latent heat of vaporization	1959.42 kJ/kg
Thermal conductivity	83.7 W/m-K at 0 C

Electrical resistivity @20 C	84 n-m
Electrochemical equivalent	Valence 3, 396.4 µg/C
Electrode potential	InDeg/In³+3e, 0.38V

Magnetic susceptibility	Volumetric: 7.0 x 10^-6mkg
Tensile strength @295K	1.6 MPa
Compressiv strength	2.14 MPa
Hardness	0.9 HB
Elastic modulus at 20 C	12.74 GPa in tension
Poisson´s ratio at 20 C	0.4498