Sputter Targets

We are a leading manufacturer and supplier of research materials


Please request your non-binding offer. You can send us an E-mail or use our inquiry form.

MaTecK supplies high-purity materials and targets for a wide variety of coating processes. You can already find many of these materials in our online shop. We are happy to manufacture special sputtering targets on customer request in order to meet the requirements of your system and your application. You can also send us your inquiry and drawing via our contact form.

We have a wide range of metals, oxides, metallic alloys, carbides, borides, fluorides, etc. We have listed some of them below, but you are welcome to surprise us with your composition.

When it comes to shaping and the production process, we adapt to your requirements. Our production also meets your specifications with high demands on composition and dimensional accuracy. The targets are manufactured using powder metallurgy (biaxial) pressing, sintering, hot pressing, hot isostatic pressing (HIP) or vacuum melting.

We would be happy to bond your target to a backplate with elastomers or indium solder. This can be provided by you or manufactured by us.

Below are examples of possible target alloys and some parameters for the different bond types.

We are also happy to manufacture new alloy compositions and geometries according to your specifications.


Please request your non-binding offer. You can send us an E-mail or use our inquiry form.


Available materials and bond types

Metals

AluminiumChromiumLeadPlatinumTantalum
AntimonyCobaltLithiumPotassiumTellurium
BariumGalliumMagnesiumRheniumTin
BerylliumGermaniumManganeseRhodiumTitanium
BismuthGoldMolybdenumRubidiumTungsten
BoronHafniumNiobiumRutheniumVanadium
CadmiumIndiumNickelSeleniumZinc
CalciumIridiumOsmiumSiliconZirkonium
CarbonIronPalladiumStrontium

Rare Earth

CeriumGadoliniumNeodymiumTerbiumVarious Rare
DysprosiumHolmiumPraseodymiumThuliumEarth alloys
ErbiumLutetiumSamariumYtterbium
EuropiumLanthanumScandiumYttrium

Alloys

Al/BAu/PtCr/SiO2CermetIr/MnSi/Al
Al/CuAu/SnCu/AlNi/CrSi/Cr
Al/Cu/SiAu/ZnCu/CrNi/FeTa/Ti
Al/CrBi/SbCu/GaNi/TiTi/Al
Al/LiBi/Sb/SeCu/NiNi/VTi/W
Al/MgBi/Sb/Se/TeCu/SnNi/ZrTi/Zr
Al/SiBi/Sb/TeFe/Al/SiOs/RuW/Ti
Al/TiBi/SeFe/CrPb/SeZn/Al
Au/SbBi/TeFe/MnPb/TeZr/Y
Au/AgCd/TeFe/Ru/Ga/SiPb/Se/Te
Au/BSo/CrFe/SiPd/Ptand others
Au/BeCo/FeFe/Si/B/CPt/Ru
Au/GeCo/Nb/ZrGe/SiPt/Ag
Au/IrCo/NiGe/TeSb/In
Au/PdCo/Ta/ZrIn/SnSb/In/Sn


Oxides

Al2O3CuOPbZrO3Supercond.Y2O3
Sb2O3HfO2 unstab.LiNbO3SrOZnO
BaTiO3HfO2/CaOMgOSrTiO3ZnO dop.
Bi2O3HfO2/Y2O3MoO3SrZrO3ZrO2 unstab.
Bi2TiO5In2O3Nb2O3Ta2O5ZrO2/CaO
Bi4Ti3O12ITONb2O5ThO2ZrO2/Y2O3
BiTiO3LaAlO3RE2O3SnO2
CeO2La2O3SiO2TiO2and others
CrO3PbTiO3SiOWO3

Borides

CrB2Mo2B6TiB2VB2and others
HfB2NbB2WbZrB2
LaB6TaB2W2B

Carbides

B4CMo2CTaCWC6%CoZrC
Cr3C2NbCTiCWC12%Coand others
HfCSiCWCVC

Fluorides

AlF3CeF3LiFRE/NaFYF3
BaF2LaF3MgF2Na3AlF6
CaF2PbF2KFThF4and others

Nitrides

AlNHfNSi3N4TiNZrN
BNNbNTaNVNand others

Silicides

CrSi2MoSi2TaSi2Ti5Si3V3Si
Cr3SiNbSi2Ta5Si3WSi2ZrSi2
HfSi2PtSiTiSi2VSi2and others

Sulfides, Selenides, Tellurides

As2S3PbSNbSe2TaTe2ZnS
CdSePbTeNb-SWSe2ZnTe
CdSeMoSe2NbTe2WsS2
CdTeMoS2TaSe2WTe2and others
PbSeMoTe2TaS2ZnSe

Other materials available upon request.

We can also offer copper backing plates and bonding.

When asking for a quotation please inform about the desired size, purity, exact composition, geometrical shape and quantity.

Elastomer Specifications

Maximum Operating Temperature
250°C
Hardness (shore A)
72
Mass Density (g/cc)
1.5
Modulus of Elasticity
1875
Youngs Modulus
1875
Poisson´s Ratio, peak stress (PSI)
0.45
Lap Shear (PSI)
461
Thermal Conductivity (W/mK)
8.6
Coefficient of Thermal Expansion (1/K)
2.20E-04
Out Gassing
NASA A Rating (less than 1% TMC @ 150C @ 1E-7Torr for 24 hr
Maximum Operating Temperature (C)
250
Electrical Conductivity (Ohm/cm)
21

Indium Specifications

Crystal structure: Face-Centered Tetragonal: at 25C,
Density @20C
7,30 gm/cc
Melting point
156.6° C
Coefficient of thermal expansion
Linear, 24.8 µm/m K at 20 C
Specific Heat: @25 C
233 J/kg-K
Latent heat of fusion
28.47 kJ/kg
Latent heat of vaporization
1959.42 kJ/kg
Thermal conductivity
83.7 W/m-K at 0 C
Electrical resistivity @20 C
84 n-m
Electrochemical equivalent
Valence 3, 396.4 µg/C
Electrode potential
InDeg/In³+3e, 0.38V
Magnetic susceptibility
Volumetric: 7.0 x 10^-6mkg
Tensile strength @295K
1.6 MPa
Compressiv strength
2.14 MPa
Hardness
0.9 HB
Elastic modulus at 20 C
12.74 GPa in tension
Poisson´s ratio at 20 C
0.4498

Overview of elements with access to our shop

1 18
H
2 13 14 15 16 17
He
Li Be B C
N
O
F
Ne
Na Mg 3 4 5 6 7 8 9 10 11 12 Al Si P S
Cl
Ar
K Ca Sc Ti V Cr Mn Fe Co Ni Cu Zn Ga Ge As Se
Br
Kr
Rb Sr Y Zr Nb Mo
Tc
Ru Rh Pd Ag Cd In Sn Sb Te I
Xe
Cs Ba La Hf Ta W Re Os Ir Pt Au Hg Tl Pb Bi
Po
At
Ra
Fr
Ra
Ac
Ce Pr Nd
Pm
Sm Eu Gd Tb Dy Ho Er Tm Yb Lu


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