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Sputter Targets


- metals, non-metals and chemical compounds
- with purity from 99 to 99.99999%

Wir bieten gerne nach Ihrer Spezifikation an!

 

Wir bonden für Sie Targets auf Kupferrückplatten mit Elastomer Bonding oder Indium Bonding

Elastomer Specifications
Maximum Operating Temperature
250°C
Hardness (shore A)
72
Mass Density (g/cc)
1.5
Modulus of Elasticity
1875
Youngs Modulus
1875
Poisson´s Ratio, peak stress (PSI)
0.45
Lap Shear (PSI)
461
 
 
Thermal Conductivity (W/mK)
8.6
Coefficient of Thermal Expansion (1/K)
2.20E-04
Out Gassing
NASA A Rating (less than 1% TMC @ 150C @ 1E-7Torr for 24 hr
Maximum Operating Temperature (C)
250
Electrical Conductivity (Ohm/cm)
21
 
 
Indium Specifications
Crystal structure: Face-Centered Tetragonal: at 25C,
Density @20C
7,30 gm/cc
 
 
Melting point
156.6° C
Coefficient of thermal expansion
Linear, 24.8 µm/m K at 20 C
Specific Heat: @25 C
233 J/kg-K
Latent heat of fusion
28.47 kJ/kg
Latent heat of vaporization
1959.42 kJ/kg
Thermal conductivity
83.7 W/m-K at 0 C
 
 
Electrical resistivity @20 C
84 n-m
Electrochemical equivalent
Valence 3, 396.4 µg/C
Electrode potential
InDeg/In³+3e, 0.38V
 
 
Magnetic susceptibility
Volumetric: 7.0 x 10^-6mkg
Tensile strength @295K
1.6 MPa
Compressiv strength
2.14 MPa
Hardness
0.9 HB
Elastic modulus at 20 C
12.74 GPa in tension
Poisson´s ratio at 20 C
0.4498
 

Sputter targets are prepared either by a melt- or a powder metallurgical process. Various geometric shapes are possible.

Metals

Aluminium Chromium Lead Platinum Tantalum
Antimony Cobalt Lithium Potassium Tellurium
Barium Gallium Magnesium Rhenium Tin
Beryllium Germanium Manganese Rhodium Titanium
Bismuth Gold Molybdenum Rubidium Tungsten
Boron Hafnium Niobium Ruthenium Vanadium
Cadmium Indium Nickel Selenium Zinc
Calcium Iridium Osmium Silicon Zirkonium
Carbon Iron Palladium Strontium  

 

Rare Earth

Cerium Gadolinium Neodymium Terbium Various Rare
Dysprosium Holmium Praseodymium Thulium Earth alloys
Erbium Lutetium Samarium Ytterbium  
Europium Lanthanum Scandium Yttrium  

 

Alloys

Al/B Au/Pt Cr/SiO2Cermet Ir/Mn Si/Al
Al/Cu Au/Sn Cu/Al Ni/Cr Si/Cr
Al/Cu/Si Au/Zn Cu/Cr Ni/Fe Ta/Ti
Al/Cr Bi/Sb Cu/Ga Ni/Ti Ti/Al
Al/Li Bi/Sb/Se Cu/Ni Ni/V Ti/W
Al/Mg Bi/Sb/Se/Te Cu/Sn Ni/Zr Ti/Zr
Al/Si Bi/Sb/Te Fe/Al/Si Os/Ru W/Ti
Al/Ti Bi/Se Fe/Cr Pb/Se Zn/Al
Au/Sb Bi/Te Fe/Mn Pb/Te Zr/Y
Au/Ag Cd/Te Fe/Ru/Ga/Si Pb/Se/Te  
Au/B So/Cr Fe/Si Pd/Pt and others
Au/Be Co/Fe Fe/Si/B/C Pt/Ru  
Au/Ge Co/Nb/Zr Ge/Si Pt/Ag  
Au/Ir Co/Ni Ge/Te Sb/In  
Au/Pd Co/Ta/Zr In/Sn Sb/In/Sn  


Oxides

Al2O3 CuO PbZrO3 Supercond. Y2O3
Sb2O3 HfO2 unstab. LiNbO3 SrO ZnO
BaTiO3 HfO2/CaO MgO SrTiO3 ZnO dop.
Bi2O3 HfO2/Y2O3 MoO3 SrZrO3 ZrO2 unstab.
Bi2TiO5 In2O3 Nb2O3 Ta2O5 ZrO2/CaO
Bi4Ti3O12 ITO Nb2O5 ThO2 ZrO2/Y2O3
BiTiO3 LaAlO3 RE2O3 SnO2  
CeO2 La2O3 SiO2 TiO2 and others
CrO3 PbTiO3 SiO WO3  

 

Borides

CrB2 Mo2B6 TiB2 VB2 and others
HfB2 NbB2 Wb ZrB2  
LaB6 TaB2 W2B    

 

Carbides

B4C Mo2C TaC WC6%Co ZrC
Cr3C2 NbC TiC WC12%Co and others
HfC SiC WC VC  

 

Fluorides

AlF3 CeF3 LiF RE/NaF YF3
BaF2 LaF3 MgF2 Na3AlF6  
CaF2 PbF2 KF ThF4 and others

 

Nitrides

AlN HfN Si3N4 TiN ZrN
BN NbN TaN VN and others

 

Silicides

CrSi2 MoSi2 TaSi2 Ti5Si3 V3Si
Cr3Si NbSi2 Ta5Si3 WSi2 ZrSi2
HfSi2 PtSi TiSi2 VSi2 and others

 

Sulfides, Selenides, Tellurides

As2S3 PbS NbSe2 TaTe2 ZnS
CdSe PbTe Nb-S WSe2 ZnTe
CdSe MoSe2 NbTe2 WsS2  
CdTe MoS2 TaSe2 WTe2 and others
PbSe MoTe2 TaS2 ZnSe  

Other materials available upon request.

We can also offer copper backing plates and bonding.

When asking for a quotation please inform about the desired size, purity, exact composition, geometrical shape and quantity.